【摘要】 对正电子湮灭术(PAS)应用于金刚石薄膜中检测空位型缺陷的研究现状进行了综述,对由正电子寿命谱、多普勒宽化因子等数据得到空垃型缺陷的浓度与大小等信息的方法进行了归纳与总结,并对正电子技术研究金刚石膜缺陷尚需注意的一些问题进行了初步分析讨论。更多还原

【Abstract】 In this paper, the current status of R&D on application of Positron Annihilation Spectroscopy(PAS) in characterization for the vacancy-type defects is reviewed. The methods to obtain concentration and size of vacancy-type defects from the data of the positron lifetime spectra and Doppler broadening parameter S are summa--ized.and some problems that need further investigation are briefly discussed and analyzed.更多还原