【摘要】 提出了一种检测三维磁场的真空微电子磁敏传感器。该传感器采用Spindt阴极阵列作为电子源 ,阳极分为五个区域 ,以便检测发射电子在磁场作用下的偏移。通过不同阴极电压下电子束流的偏移量的差值 ,可求出器件所在位置磁场的三个分量。对传感器的灵敏度和误差进行了模拟计算 ,并研究了它们与阳极电压、阴 阳极间距及阳极电压变化步长的关系。结果表明该传感器的灵敏度约为 80 0 % ,相对误差为 3%。更多还原

【Abstract】 A vacuum microelectronic magnetic sensor with new structure was presented. The anode of this kind of sensor was divided into five center symmetrical areas which were used to detect the deflection of the electron under certain magnetic field. Through the differences of electron deflection under different magnetic fields,the magnetic field where the sensor was located was determined. The relations between deflection of electron and magnetic field in this kind of structure were analyzed with analytical and numerical method respectively. The sensitivity ratio and relative error are 800% and 3% repectively.更多还原