【摘要】 用Raman散射研究了对向靶反应溅射法制备的CN薄膜的键结构研究表明，在C膜中掺杂N可以抑制CN膜中sp3键的形成，提高sp2键的相对含量，改善C膜的结构效稳定性更多还原

【Abstract】 The thermal stability of CN films prepared by dual-facing-target sputtering was investigated by using Raman scattering. The results indicate that the formation of sp3 bonding can be suppressed by doping N atoms, and therefore the fraction of sp2 bonding is increased. It was also found that nitrogen incorporating is an effective method to improve the thermal stability of C films.更多还原