【摘要】 在光纤探针扫描使表面轮廓对光产生调制原理的基础上提出了光学针描法的粗糙度测量技术。对光学针描法的理论基础， 如表面轮廓调制原理和光耦合区理论进行了较为深入的分析。对单模光纤探针式轮廓仪的实验系统进行了介绍， 最后给出了实验结果和误差分析。更多还原

【Abstract】 A new roughness measurement technique, optical stylus method is presented. The principle of the new method is based on the phenomenon of light modulated by surface profile. The modulation principle, the theory of light coupled area, a optical profilometer with a single mode fiber probe and experiment results are detailed.更多还原