【摘要】 按照电化学原理分析硅片化学腐蚀过程，阐述了择优与非择优腐蚀的机理，研究了一套硅片化腐新工艺。这些工艺在电力半导体器件生产中得到了成功的应用。更多还原

【Abstract】 The chemical corrosion process is analyzed,and preferred orientation and no preferred orientation corrosion mecharism of silicon wafer were discussed according to electrochemistry principle.A set of new technologies of chemical corrosion was improved by using micro corrosion cleaning of silicon wafer. The chemical corrosion was found successfully aplied to producting power semiconducdor devices.更多还原