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具有PDEB LB膜的声表面波湿度传感器
SAW Humidity Sensor with PDEB Langmuri Blodgett Membrane
【摘要】 介绍一种新型聚炔离子导体湿敏材料——聚对二炔苯(PDEB)的Langmuir-Blodgett(LB)成膜原理与制备,淀积有10层PDEBLB膜层的声表面波延迟线型湿度传感器的特性。由于LB成膜技术拉制的膜可以在分子水平上进行定量控制,保证了膜的均匀性和一致性。实测结果表明,具有PDEBLB膜的声表面波湿度传感器灵敏度为-0.5kHz/RH%,线性度良好。
【Abstract】 This paper describes the principle and preparation of the Langmuir Blodgett (LB) membrane formed by a new type of humidity sensitive material:polyeiethynl benezene (PDEB).Humidity sensor made by SAW delay line oscillator is deposited with 10 layers of the PDEB LB membranes and its property is also discussed in this paper.Since the LB membrane can well be controlled in molecular degree,thus ensure the uniformity and unity of the LB membrane.Experiments show that SAW humidity sensor with PDEB LB membrane has sensitivity of 0.5 kHz/RH% with good linearity.
【Key words】 SAW; LB membrane; humidity sensor; polyeiethynl benezene;
- 【文献出处】 压电与声光 ,PIEZOELECTRICS & ACOUSTOOPTICS , 编辑部邮箱 ,1998年01期
- 【分类号】TB5,TP212
- 【被引频次】1
- 【下载频次】59