【摘要】 本文总结了气体传感器中微加热器的材料、结构及热特性，列举了常见的几种微加热器，对Ｐｔ加热器和多晶Ｓｉ加热器进行比较，并在此基础上简要介绍了传感器阵列中微加热器的制作及气体传感器阵列的气敏特性。更多还原

【Abstract】 The materials、structures and thermal characteristics of microheater in gas-sensors were discussed in this paper. Some common microheaters were summarized. The comparisons between Pt heater and poly-Si heater were provided. Finally, the microheater in gas sensor arrays and the gas sensitivity of sensor array were briefly introduced.更多还原