【摘要】 介绍一种结构紧凑、分辨率高、动态性能好、安装方便的压电陶瓷旋转型驱动器。驱动器内部藏有电阻应变式角位移传感器，具有机构、驱动、检测一体化的特点。该驱动器有多个联接结合面，并且结构要素一致，可以方便地与其他旋转型驱动器或直线型驱动器组装成多自由度的微驱动机器人系统。更多还原

【Abstract】 In this paper,a compact rotational piezoelectric driving module,which has nano dis-placement resolution and very good dynamic charactreristics, is proposed. There is the micro displacement mechanism equipped with inner micro sensors in the module, which integrates mechanism, actuator and sensors. The module has several coupling surfaces which. have the same member. The module can be conveniently combined with the other rotational or translational modules to construct a micro robot system with various degrees of freedom.更多还原