【摘要】 对不同成分的PCVD－Ti（CXN1－X）膜的组织结构及性能进行了研究。结果表明，Ti（CN）膜的高硬度、高致密组织和膜表面因吸附氧而形成的与TiN不同的表面结构是Ti（CN）膜性能优于TiN膜的重要因素。在冷挤压模上应用结果也表明，用PCVD法制备的Ti（CN）膜和TiC膜的使用效果要比TiN膜好得多。更多还原

【Abstract】 Ti (CXN1-X) coatings with different C and N contents were prepared using DC discharge plasma chemical vapor deposition (DC-PCVD). These coatings were characterized and used in cold extrusion dies. The wear resistance of Ti(CN) coatings is much better than that of TiN coatings. The improvement of coating properties upon adding carbon to TiN could be attributed to the higher hardness,denser structure and different chemical state of oxygen adsorbed on the surface of the coatings.更多还原