【摘要】 本文介绍我们开发的FED工艺，包括：硅锥场致发射阵列的制作，栅极制作，阳极支柱（阵列）的制作和平板透明真空封装，对工艺中的难点及对策作了详细描述。利用上述工艺，已经制成了平板数码管，其栅阴特性理想，阳阴之间也能测得明显的场致发射特性并伴有荧光激发。目前，数码管玻壳内真空度的维持、栅控特性及荧光的均匀性还存在问题，文章最后分析了其原因。更多还原

【Abstract】 The piocessing developed for vacuum microelectronic flat-panel nixie were introduced, including the fabrication of the field emission arrays,the gates,anode pillars and the transparent flat-panel vacuum packages. The difficulties in the processing and the method to overcome them were described in detail. The flat-panel nixies with ideal I-V characteristics between gates and cathodes have been fabricated with the processing. Field emission characteristic was also detected between cathodes and anodes, and the fluorescence light was found.Some problems in maintaining the vacuum in package,getting gate-controlling function and uniform light emission were analyzed.更多还原