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低压MOCVD外延生长InGaAsP/InP应变量子阱材料与器件应用

InGaAsP/InP Strained Layer Quantum Well Materials Grown by LP-MOCVD and Their Device Applications

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【作者】 马骁宇; 王树堂; 熊飞克; 郭良; 王仲明; 曾靖; 王丽明; 陈良惠;

【Author】 Ma Xiaoyu; Wang Shutang; Xiong Feike; Guo Liang; Wang Zhongming;Zheng Jing; Wang Liming and Chen Lianghui(The Institute of Semiconductors, The Chinese Academy of Sciences, Beijing 100083)Received 18 September 1995, revised manuscript received 5 January 19

【机构】 中国科学院半导体研究所;

【摘要】 本文报道用低压有机金属化合物化学气相淀积(LP-MOCVD)外延生长InGaAsP/InP应变量子阶材料,材料参数与外延条件的关系,量子阱器件的结构设计及其器件应用.用所生长的材料研制出宽接触阈值电流密度小于400A/cm2(腔长400μm),DC-PBH结构阈值7~12mA的1.3μm量子阱激光器和宽接触阈值电流密度小于600A/cm2(腔长400μm),DC-PBH结构阈值9~15mA的1.55μm量子阶激光器以及高功率1.3μm量子阱发光二极管和InGaAsPIN光电探测器.

【Abstract】 Abstract InGaAsP/InP strained layer quantum well (SL-QW) materials grown by low pressure metal organic chemical vapour deposition (LP-MOCVD) are reported. The telationship between the material parameters and the epitaxial conditions, the structural design of quantum well device and its applications are given in this paper. 1. 3μm SL-QW laser and 1. 55μm SL-QW lasers with broad area threshold current densities as low as 400A/cm2 and 600A/cm2(at cavity length 400pm), DC-PBH stripe device threshold current 7 ̄ 12mA and 9 ̄ 15mA were obtained, respectively. High power 1. 3μm QW light emitting diodes (LED), and InGaAs PIN photodetectors with high performace were also obtained by LP-MOCVD epitaxial materials.

【基金】 国家“863”重大项目
  • 【文献出处】 半导体学报 ,CHINESE JOURNAL OF SEMICONDUCTORS , 编辑部邮箱 ,1996年05期
  • 【分类号】TN304.054
  • 【下载频次】120
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