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MOCVD生长大功率单量子阱激光器

High-Power SQW Lasers by MOCVD Growth

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【作者】 郑联喜; 肖智博; 韩勤; 金才政; 周帆; 马朝华; 胡雄伟;

【Author】 Zheng Lianxi; Xiao Zhibo; Han Qin; Jin Caizheng;Zhou Fan; Ma Chaohua and Hu Xiongwei(Institute of Semiconductors, The Chinese Academy of Sciences, Beijing 100083)Received 27 October 1995, revised manuscript received 2 January 1996

【机构】 中国科学院半导体研究所;

【摘要】 本文介绍了MOCVD生长的高质量GaAs和AlAs材料以及(Al)GaAs/AlGaAs分别限制单量于阱激光器.GaAs材料的77K迁移率为122,700cm2/(V·s),GaAs/AlAs具有均匀陡变的界面.激光器的最大光输出功率为4W,平均光功率密度达4MW/cm2,斜率效率为1.2W/A,在1W恒功老化4000小时电流增加小于10%,预计寿命可超过两万小时.

【Abstract】 Abstract High quality GaAs and AlAs thin film materials and high-power GaAs/AlGaAs graded-index separate confinement single quantum well lasers have been grown using metalorganic chemical vapor deposition. 77K mobility of the GaAs thin film is 122, 700 cm2·V-1· s-1. The uniform and sharp GaAs/AlAs interfaces are obtained. For a 100μm wide stripe laser, a CW optical power of 4W has been achieved at room temperature, the output power density is 4MW/cm2 and the slope efficiency is as high as 1. 2W/A. Working current increases by less then 10% after 4000 hours of testing under 1W optical power.

  • 【文献出处】 半导体学报 ,CHINESE JOURNAL OF SEMICONDUCTORS , 编辑部邮箱 ,1996年05期
  • 【分类号】TN248
  • 【被引频次】5
  • 【下载频次】49
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