【摘要】 介绍了最新设计的二级透镜聚焦离子束系统，该系统具有高速消隐、束径束流电可调等特征。给出了该系统的设计计算和调测结果。在束能15keV、束流30pA时，束径达到0．1μm。更多还原

【Abstract】 A newly designed FIB system, characterized by high speed blanking,electrically adjustable beam current and beam diameter, is introduced in this paper, together with calculatons and experimental results. A beam diameter of 0. 1μm is attained while the beam energy and beam current are 15 keV and 30 pA, respectively.更多还原