【摘要】 用等离子体化学气相沉积（ＰＣＶＤ）技术制备了ＴｉＮ，ＴｉＣ，Ｔｉ（ＣＮ）和（ＴｉＳｉ）Ｎ膜及其组合的多层膜。ＰＣＶＤ具有很好的覆盖性，ＰＣＶＤ－ＴｉＮ具有很好的耐磨耐蚀性，膜与基体结合良好，因而用ＰＣＶＤ法在高速钢刀具，模具及轴承上沉积ＴｉＮ可大大提高其使用寿命。ＰＣＶＤ－ＴｉＣ和Ｔｉ（ＣＮ）膜无明显柱状晶，其显微硬度高于ＴｉＮ，亦可用于高速钢刀具及模具上提高其使用寿命。ＰＣＶＤ（ＴｉＳｉ）Ｎ的晶粒细化，氯含量和显微硬度随Ｓｉ含量而变化，（ＴｉＳｉ）Ｎ具有很好的抗高温氧化性。多层膜可调节膜层结构，减少残余应力，提高膜的机械性能。更多还原

【Abstract】 TiN,TiC,Ti(CN),(TiSi)N hard coatings and their multicomponentmixed layers were prepared by PCVD,The PCVD Technique has good step cov-erage.PCVD-TiN exhibit good wear-resistance,corrosion-resistance and goodadhesion,so PCVD-TiN coatings on the HSS tools, moulds and bearings couldgreatly increase their working life. Unlike coventional PCVD-TiN,no colum-nar growth are evident in PCVD-TiC and Ti(CN)coatings,whose microhard-ness is higher than TiN coatings. The PCVD-TiC and Ti(CN)coatings couldalso be used in HSS tools and moulds and increase their working life,The fine-grained structures could be got in PCVD-(TiSi)N,in which Cl content and mi-crohardness were changed with Si content.(TiSi)N coatings are good antioxy-genic in high temperature,Multilayers could modulate layer structures,reduceresidual stresses and increase mechanical properties of the coatings.更多还原