【摘要】 本文介绍了我校研制的矢量扫描电子束曝光机中，扫描场非正交性畸变的校正情况，该机器的偏转系统为内透镜双磁偏转方式。更多还原

【Abstract】 The paper introduces a method of correction of non -orthogonal distortionin scanning field of a vactor scan electron-beam lithography machine which isdeveloped in our university. The deflecting system of the machine uses in -lens double magnetic deflection technique.更多还原