【摘要】 全反射荧光X射线分析法,最初是作为一种提高能量色散型荧光X射线分析灵敏的方法提出来的。严格控制试验条件,可将这种方法用于表面分析。已经证明全反射荧光X射线分析法是一种有效的微量元素分析和表面分析方法。将在半导体、金属、医学等领域中得到实际应用。本文叙述了全反射荧光X射线分析的发展历史、测量原理、仪器设备、定量分析、近期发展和应用。更多还原

【Abstract】 Total reflection X-ray fluorescence spectrometry (TXRF)was initially developed for up grading the detection performance in energy dispersive XRF. Through control of testing condition in this method will make feasible the extension of this method to surface analysis. TXRF has been shown to be a powerful analytical tool for trace element determinations and surface analysis for semiconductors, matals, medicines and others. This paper describes the history, principle, instrumentation, quantitative analysis, recent development and applications of TXRF.更多还原