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多孔径扫描波面恢复技术的精度评定及影响因素
Factors Having influence on the accuracy of multi-aperture overlap-scanning technique (MAOST) and Analysis
【摘要】 多孔径扫描波面恢复技术是一项新的高精度大孔径面形检测手段.本文从建立波面恢复精度的评价标准出发,结合实测结果进行讨论,并对影响精度的两个重要因素即拼接模式及拼接区大小进行分析.
【Abstract】 Multi - aperture overlap - scanning technique (MAOST) is a effective meansof measuring large aperture wavefront of high precision. Having giventhe accuracy definition of MAOST, this paper discusses, withexperimental tests, two main influential factors, i. e. , the apertureconnection mode and overlap coefficient.
【关键词】 多孔径扫描;
波面恢复;
大孔径面形检测;
【Key words】 multi- aperture overlap scanning; wavefront restroration; large optics test;
【Key words】 multi- aperture overlap scanning; wavefront restroration; large optics test;
- 【文献出处】 光学学报 ,Acta Optica Sinica , 编辑部邮箱 ,1993年08期
- 【被引频次】20
- 【下载频次】87