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低阈值InGaAs-GaAs应变层多量子阱激光器
Low Threshold Current InGaAs-GaAs Strained Layer Quantum Well Laser
【摘要】 采用分子束外延(MBE)和二次液相外延技术(LPE)研制出InGaAs-CaAs折射率缓变分别限制应变层多量子阱(GRINSCH-STL-MQW)掩埋异质结(BH)激光器.在宽接触阈值电流密度1 kA/cm~2的条件下,获得了很低的阈值电流,室温时,腔面未镀膜激光器的阈值电流为5.6mA.(L=120μm,CW.20℃)激射波长为9386A左右.外微分量子效率高达每面0.48mW/mA,最高输出功率大于30mW.
【Abstract】 Graded index separated confinement heterostructure strained layer multi-quantum-well(GRINSCH-STL-MQW) buried hererostructure (BH) lasers were fabricated by a hybrid mo-lecular beam epitaxy (MBE) and liquid phase epitaxy (LPE) technique. Low threshold cur-rent, 5.6 mA for an uncoated laser (L=120μm, CW, 20℃), was achieved with the MBE waferthreshold current density of 1 KA/cm~2. Lasing wavelength is 9386A. External quantum effic-iency as high as 0.48 mW/mA and more than 30 mW output power were obtained.
- 【文献出处】 半导体学报 ,Chinese Journal of Semiconductors , 编辑部邮箱 ,1992年04期
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