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低阈值InGaAs-GaAs应变层多量子阱激光器

Low Threshold Current InGaAs-GaAs Strained Layer Quantum Well Laser

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【作者】 肖建伟; 徐俊英; 杨国文; 徐遵图; 张敬明; 陈良惠; 周小川; 蒋健; 钟战天;

【Author】 Xiao Jianwei/Institute of Semiconductors, Academia Sinica,Beijing.100083Xu Junying/Institute of Semiconductors, Academia Sinica,Beijing.100083Yang Guowen/Institute of Semiconductors, Academia Sinica,Beijing.100083Xu Zuntu/Institute of Semiconductors, Academia Sinica,Beijing.100083Zhang Jingming/Institute of Semiconductors, Academia Sinica,Beijing.100083Chen Lianghui/Institute of Semiconductors, Academia Sinica,Beijing.100083Zhou Xiaochuan/National Laboratory for Surface Physics,Academia Sinica,Beijing,100080Jiang Jian/National Laboratory for Surface Physics,Academia Sinica,Beijing,100080Zhong Zhantian/National Laboratory for Surface Physics,Academia Sinica,Beijing,100080

【机构】 中国科学院半导体研究所集成光电子学国家重点联合实验室; 中国科学院表面物理实验室; 中国科学院表面物理实验室 北京100083; 北京100083; 北京100080; 北京100080;

【摘要】 采用分子束外延(MBE)和二次液相外延技术(LPE)研制出InGaAs-CaAs折射率缓变分别限制应变层多量子阱(GRINSCH-STL-MQW)掩埋异质结(BH)激光器.在宽接触阈值电流密度1 kA/cm~2的条件下,获得了很低的阈值电流,室温时,腔面未镀膜激光器的阈值电流为5.6mA.(L=120μm,CW.20℃)激射波长为9386A左右.外微分量子效率高达每面0.48mW/mA,最高输出功率大于30mW.

【Abstract】 Graded index separated confinement heterostructure strained layer multi-quantum-well(GRINSCH-STL-MQW) buried hererostructure (BH) lasers were fabricated by a hybrid mo-lecular beam epitaxy (MBE) and liquid phase epitaxy (LPE) technique. Low threshold cur-rent, 5.6 mA for an uncoated laser (L=120μm, CW, 20℃), was achieved with the MBE waferthreshold current density of 1 KA/cm~2. Lasing wavelength is 9386A. External quantum effic-iency as high as 0.48 mW/mA and more than 30 mW output power were obtained.

  • 【文献出处】 半导体学报 ,Chinese Journal of Semiconductors , 编辑部邮箱 ,1992年04期
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