【摘要】 漏气率是磁流体真空动密封组件的关键技术指标。本文描述了磁流体真空动密封组件的结构、检漏系统以及氦质谱仪充气检漏方法。文中给出了测试结果。更多还原

【Abstract】 The leak rate is the key specifi cation of vacuum dynamic sealing with magnetic fluid. In this paper, the construction of component of vacuum dynemic sealing with magnetic fluid,leak detecting system and leak detection method filling gas with Helium mass spectrometer leak detector are introduced. In the paper, we gave the measuring results.更多还原