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真空电弧等离子射流蒸发法沉积超微粉

PREPARATION SUPERFINE POWDER BY VACUUM ARC PLASMA JET EVAPORATION METHOD

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【作者】 林成福黄荣芳俞兵钱声伟关侃

【Author】 LIN Chengfu HUANG Rongfang YU Bing QIAN Shengwei GUAN Kan (Institute of Metal Research,Academia Sinica)

【机构】 中国科学院金属研究所中国科学院金属研究所

【摘要】 在真空电弧等离子喷涂设备上设计安装了超微粉的制备装置。制备出 Fe,Si,Ni,Mo,TiAl,Ti3Al 和 Si3N4等超微粉。通过控制真空室工作压力和等离子弧电流,超微粉的粒度可分别为5,10,20和50nm。观察了粉的形状、分布,测试了沉积速率。

【Abstract】 The device preparing superfine powder was designed and installed in LPPS.The superfine powders,such as Fe,Si,Ni,Mo,TiAl,Ti3Al and Si3N4,were obtained by vac-uum arc plasma jet evaporation method.The size of the superfine powders are about 5,10,20 and 50nm respectively,which was controlled by vacuum chamber pressure and electriccurrent of the P.J gun.Shape and distribution of the particles were observed.The deposi-tion rate of the superfine powder was examined.

【关键词】 等离子射流蒸发超微粉
【Key words】 plasma jetevaporationsuperfine powder
  • 【文献出处】 材料科学进展 , 编辑部邮箱 ,1991年06期
  • 【被引频次】1
  • 【下载频次】33
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