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调制掺杂结构的光反射光谱研究

Photoreflectance Study on Modulation-Doped Structures

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【作者】 汤寅生; 江德生; 庄蔚华; 孔梅影; 徐英武;

【Author】 Tang Yinsheng/The Center of Matter Structure analysis and the Center of Fundamental Physics,The Science and Technology University of China, HerfeiJiang Desheng/Institute of Semiconductors and National Laboratory of Semiconductor Superattices and Related Mierostructures, Academia Sinica, BeijingZhuang Weihua/Institute of Semiconductors and National Laboratory of Semiconductor Superattices and Related Mierostructures, Academia Sinica, BeijingKong Meiying/Institute of Semiconductors and National Laboratory of Semiconductor Superattices and Related Mierostructures, Academia Sinica, BeijingXu Yingwu/The Center of Matter Structure analysis and the Center of Fundamental Physics,The Science and Technology University of China, Herfei

【机构】 中国科技大学物质结构中心和基础物理中心; 中国科学院半导体研究所超晶格微结构国家重点实验室; 中国科技大学物质结构中心和基础物理中心 北京912信箱100083 博士研究生; 北京912信箱100083;

【摘要】 测量了分子束外延(MBE)生长的调制掺杂n-GaAlAs/GaAs的光调制反射光谱(PR),研究了光谱结构和三角阱中子能级的关系以及光反射调制谱与二维电子气(2DEG)浓度的依赖关系.实验结果与理论分析符合得较好.

【Abstract】 The photoreflectance (PR) spectra of modulated-doped n-GaAlAs/GaAs structures gro-wn by Molecular Beam Epitaxy (MBE) are measured. The correlation between spectroscopicfeatures and sublevels in the triangular potential well and the dependence of PR spectra onthe two-dimensional electron gas (2DEG) concentration, are investigated. The experimentalresults are in good agreement with the theoretical analysis.

  • 【文献出处】 半导体学报 ,Chinese Journal of Semiconductors , 编辑部邮箱 ,1991年01期
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