【摘要】 本文研究了Ar⁺+N⁺注入铍表面Ti膜后,表面层的强化效应。实验先以Ar⁺注入(剂量为4.5×10¹⁶/cm²),再注入N⁺(剂量分别为1.6×10¹⁷/cm²、3.3×10¹⁷/cm²、5.5×10¹⁷/cm²),研究表面硬度及磨损速率随N⁺注入剂量的变化关系,结果表明,N⁺注入对表面硬度及耐磨性能有很大改进,并有一最佳剂量。X射线衍射分析得到,N离子注入后表面生成了TiN硬质相,并用RBS观察了膜与基体间的界面情况。更多还原

【Abstract】 In this paper, we studied the effect of Ti film strengthened by Ar⁺+N⁺ implantation. The surface hardness and the wearing properties with doses of 1.6×10¹⁷ N⁺/cm²,3.3×10¹⁷ N⁺/cm², 5.5×10¹⁷N⁺/cm² after 4.8×10¹⁶Ar⁺/cm² have been tested. The experimental results show that the surface hardness and the wearing properties have have been improved by ion implantation and the best dose exists. The results of X-ray diffraction show that there are phases of TiN after N⁺ implantation, and the boundary of the film and the aubstrate is analyzed by RBS.更多还原