【摘要】 本文叙述了一套用于超导器件制备的等离子体加工工艺的建立过程,介绍了这套工艺在刻蚀、清洗去胶等方面的应用,指出了等离子体加工工艺对基片损伤轻微、去胶、清洗时污染源、残留物少并有可利用的对不同材料的刻蚀选择性。更多还原

【Abstract】 This paper describes the establishment of ft plasma processing procedure used for superconducting device fabrication and the application of the procedure in etchings cleaning and photoresist removing.The plasma processing procedure with useful selective etching is harmless to the surface of the substrate and its cleaning result is better for fewer contamination sources and less remainder.更多还原