【摘要】 本文报道我们设计和制造的小型rf氧化清洗装置,用于制备超导隧道结。文中概述了这种装置的国内外概况和rf氧化与清洗原理;介绍了本装置的结构、特点,调试结果和使用效果。更多还原

【Abstract】 This paper presents a small-size rf oxidizing and cleaning installation designed and fabricated by us.At first,summaries the general situations for the rf oxidizing and cleaning installations at home and abrad,and the principle of the rf oxidizing and cleaning.And then,presents the structures,featuies,testing resultants,and the effect of using this installation.更多还原