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低气压水冷空腔电弧阴极研究

INVESTIGATION OF WATER COLD CUP SHAPE ARC CATHODE AT LOW PRESSURE

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【作者】 王殿儒; 田大准;

【Author】 Wang Dian-ru (Institute of Mechanics Academia Sinica)Tian Da-zhun (Beijing Institute of Optics and Electronics)

【机构】 中国科学院力学研究所; 北京光电技术研究所;

【摘要】 本文介绍低气压水冷空腔电弧阴极的设计原理和实验结果。该冷电弧阴极在发射电流为150安培情况下已累计运行100小时以上并可继续运行。所设计的冷电弧阴极在用于全金属结构氩离子激光器和离子镀膜装置中时,均取得成功结果。

【Abstract】 In this Paper, a low pressure water cold cup shape are cathode has been investigated, which operates at are current of 150A. The lifeime of the cathode at this current amounts to 100 hours and it is still capable of continuing the operation. The cathode has been successfully applied to an all-metal argon are laser and anion plating equipment.

  • 【文献出处】 真空科学与技术 , 编辑部邮箱 ,1985年01期
  • 【被引频次】1
  • 【下载频次】38
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