【摘要】 本文评述了用集成电路刻蚀技术制造的微小型J-T制冷器的发展概况、关键技术、设计考虑、典型产品的性能参数及其在固体激光器、大规模集成电路和光电探测器等方面的可能应用。更多还原

【Abstract】 The status of development, key technology, design consideration, and performance parameters of typical products of the microminiature J-T refrigerators using photolithographic fabrication techniques are revtewed and it’s possible appli-cations in the fields of solid state laser, L虲 and electro-optical detectors etc are introduced in this paper.更多还原