【摘要】 采用钽针尖氮化法首次制得了氮化钽场发射阴极。在加速电压为6.8kV,尖端温度为1300℃时,热场发射电流达210μA,相应的亮度可达3×10⁸A/cm²·str,角电流密度为5×10³μA/str。在真空度为10^-8托时,能得到较为稳定的发射,30分钟内发射电流的漂移在2.5％以下。典型的场发射图象由中央为暗区,二侧有二叶对称的明区所构成。采用俄歇谱仪对阴极表面进行了组成分析。更多还原

【Abstract】 Tantalum nitride field emitters are fabricated by nitrifying a tantalum tip, which give an electron emission current of 210μA at the tip voltage of 6.8 kV and the temperature of 1300℃. with a brightness of 2×108 A/cm2. str and an angular current density of 5× 103 μA/str. The current fluctuation is small at the pressure of 10-8Torr. Typical field emission patterns are presented with a dark region at the center and two symmetrical bright regions on both sides. The composition of tip surfaces is analysed by a scanning Auger mic-roprobe.更多还原