【摘要】 本文给出氦、氩离子法向轰击多晶元素靶时,原子溅射率Y_o随离子能量E变化的经验公式.采用下面二个步骤,可以导出这个公式.首先,把Sigmund 溅射率公式（1）中的表面升华能U_s改为离靶组合的溅射阈能E_th. 其次,再把上式乘以Matsunami提出的低能修正因子g（E）.另外,我们还导出了适用于轻、重离子的溅射阈能经验公式E_th=U_s·exp（r）/r.其中:r=4M/（1+M）²,M=M₂/M₁是靶原子的相对原子量.计算结果表明:对于低能离子（E≤1keV）而言,由经验公式算出的溅射率Y_o与实验值Y之间的相对误差不超过20％.但是,低能下的Sigmund理论溅射率Y_s约为实验值的二至二十五倍.由此可知:经验溅射率公式（30）基本上是成功的.更多还原

【Abstract】 A new empiric formula of sputtering yields for monoatomic polyerystal solids bom-barded by light and heary ions at normal incidence is presented.It can be derived asfollows: Firstly,a modified sputtering formula is obtained by replacing the sublimationheat Us for the solids in Sigmund equation with the threshold energy E_th for ion-targetcombinations.Secondly,the modified formula is multiplied by a calibration factor,g（E）=1-(E_th/E)（1/2） suggested by Matsunami.Where E_th=U₅·exp（γ）/γ,γ=4M/（1+M）² and M=M₂/M₁.M₁ and M₂ are the atomic weights of incident ions and target atomsrespectively.Finally,the calculation results show:The sputtering yield of He⁺ andAr⁺ at 600 eV on normal incidence evaluated using the empiric formula is accurate wi-thin an error of ±20%.But Sigmund equation is always overestimated at low energiesby a factor nearly distributed from 2 to 25.更多还原