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Pt/InP界面反应形成磷化铂的证据

Evidence of Platinum Phosphide Formation at Pt/InP Interface by Interface Reaction

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【作者】 戴道宣; 唐厚舜; 姜国宝;

【Author】 Dai Daoxuan/Institute of Modern Physics, Fudan UniversityTang Houshun/Institute of Modern Physics, Fudan UniversityJiang Guobao/Institute of Modern Physics, Fudan University

【机构】 复旦大学现代物理研究所; 复旦大学现代物理研究所;

【摘要】 用XPS测量了Pt/InP肖特基接触界面的芯态谱和价带谱,结合AES测量,提出了在界面形成磷化铂的实验证据.同时也测到Pt4f两自旋分裂峰强度比随光电子发射角的反常变化.

【Abstract】 The spectra of the core level and valence band at Pt/InP Schottky contact inter-face have been measured by XPS,experimental evidence of platinum phosphide for-mation at the interface has been suggested combinding AES measurement. And theanomalous change of the intensity ratio of two Pt4f spinsplitting peaks with photoele-ctron emission angle has been obtained.

  • 【文献出处】 半导体学报 ,Chinese Journal of Semiconductors , 编辑部邮箱 ,1985年02期
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