【摘要】 本文系统地阐述了玻粉电泳沉积的基本理论和规律,并推导了玻粉电泳沉积的动力学方程;论述了用此技术制造微波半导体器件的工艺原理、特点和途径。所制器件寄生参量小、可靠性高,在毫米波电路中显示出极大的优越性。更多还原

【Abstract】 This paper systematically deals with basic theory and rules of electrophoretic deposition glass particles, and derives its kinetics equation as well.Also disscussed are primary technology principles as well as the approach and special technology of microwave semiconductor devices developed by the electrophoretic method.The finished devices have high-reliability and less parasite parameter showing promising applications in mm-wave circuit.更多还原