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样品厚度对表面光电压法测试少子扩散长度的影响

Effect of Sample Thickness on Measurement of Minority Carrier Diffusion Length in SPV Method

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【作者】 杨恒青; 姜国庆; 陈玉金; 包宗明;

【Author】 Yang Hengqing/Fudan UniversityJiang Guoqing/Fudan UniversityChen Yujin/Fudan UniversityBao Zongming/Fudan University

【机构】 复旦大学; 复旦大学;

【摘要】 本文定量分析了样品厚度d及单色光的透入深度α-1对表面光电压法测试少于扩散长度的影响,并从实验上进行了验证.本文还讨论了样品厚度对两点法直读少子扩散长度测试结果的影响,并给出从测得的表观扩散长度定出真实扩散长度的方法.观察了光生非平衡载流子的注入水平对扩散长度测试结果的影响.

【Abstract】 In SPV method,if the thickness of sample is comparable with the penetration depthof monochromatic light,the former will effect the measurement of minority carrier diffu-sion length.A quantitative analysis and experimental examination on this object are repor-ted.Similarly,in the simple SPV method of fast reading minority carrier diffusion lengthby taking measurements at two wave lengths,the thickness of sample also effects the me-asurement of diffusion length.A method of finding the real diffusion length from the appa-rent one is suggested.The effect of non-equilibrium carrier level on the measurement ofdiffusion length is observed as well.

  • 【文献出处】 半导体学报 ,Chinese Journal of Semiconductors , 编辑部邮箱 ,1984年01期
  • 【被引频次】6
  • 【下载频次】113
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