【摘要】 透射电子显微镜分析表明,高剂量的氧离子注入能够改变金属薄膜的结构。注入的氧离子使面心立方的多晶铝薄膜变成非晶态的三氧化二铝;使体心立方的多晶铁薄膜变成面心立方的四氧化三铁。更多还原

【Abstract】 With the results analyzed by a EM-400T transmission electron microscope,the effect of O+-ions implantation on the structures of filmy aluminium and iron has been experimentally investigated.Metal-grade purities of Al and Fe films vacuum-prepared were,respectively,99.99% and 99.999% and film thickness were about 300~400A.Energy of O+-ions implanting in these films was equal to 27 keV.TME diffractions observed before and after O+-ions implanting reveal that a larger dose of ions,in the present work which is 1×1017 ions/cm2 for Al film or 3×1017ions/ cm2 for Fe film,can alter the structure of metal film as it was.Results of O+-ions implantation show the structure alteration that the multi-crystal face-centered cubic Al film becomes non-crystal Al2O3 and the multi-crystal body-centered cubic Fe film becoms face-centered Fe3O4.Maybe the investigation of ions implantation in metal plays an important role and opens up a new field in metallurgy in the near future.更多还原