【摘要】 空间行波管广泛应用于雷达、卫星通信等方面,在器件制造过程中,真空是空间行波管工作的基础条件。利用极高真空排气设备获得了极限真空优于5×10^-9Pa的空间行波管;采用四级质谱计分析了空间行波管的排气过程和极限真空状态下的残气质谱,并由此确定了空间行波管经济可行的烘烤排气时间。利用四极质谱计对空间行波管进行了检漏实验,结果表明四极质谱计具有很高的灵敏度,非常适合极高真空的检漏。建立了放气量极低的测量空间行波管真空度的测试平台。对空间行波管的老练、高低温实验、存储等过程的真空度进行了测试。空间行波管在进行老练时,管内真空度下降约一个数量级,经过140h老练后,在老练离子泵的抽气作用下,管内真空度上升到5.0×10^-8Pa,这时去掉老练离子泵,其真空度基本保持不变。最后进行了高低温冲击实验,并在室温下存储6个月,真空保持良好。这些结果为分析空间行波管质量提供了很好的依据。更多还原

【Abstract】 Spacce traveling-wave tube（STWT） are used in a wide variety of areas, such as radar, space technology and electron accelerators. The vacuum is one of the basic conditions for the work of STWT. We use ultra-high vacuum exhaust station to obtain a microwave device with the ultimate vacuum better than 5 × 10^-9 Pa; The residual gases in a macro-wave device during thermal degassing was in-situ monitored with quadrupole mass spectrometer（ QMS）. The major residual gases, including but not limited to H₂O, CO, and H₂, was investigated. It is shown that 36 hours was economically for the baking exhaust time. The operating principle and method of vacuum leak detection using QMS are introduced, and the leak detection was conducted for macro-wave device experimentally. Satisfactory results were obtained and showed that QMS has so predominant advantage that no leak detector can get over. A test platform for measuring the vacuum of the microwave device has been established. After the STWT sealing off the exhaust equipment, sophisticated, storage and high and low temperature test process of vacuum was tested.When the STWT is sophisticated, the vacuum in the device is reduced by an order of magnitude. After 140 h, the vacuum of the device rises to 5.0 × 10^-8 Pa under the ion pump. At this time, the vacuum remained basically unchanged after removing the ion pump. Finally, high and low temperature impact experiments were performed and stored at room temperature for 6 months, the vacuum of the STWT is kept in good. These results provide a good basis for analyzing the quality of the STWT.更多还原