【摘要】 阐明了电化学微传感器的特性,对化学电阻微传感器和电势计微传感器这两类电化学传感器分别进行了论证;分析了离子敏场效应晶体管化学传感器和功函数电势计传感器的机理和特性,指出了电化学微传感器应用方向。阐述了利用有机半导体的光刻工艺及其可调谐选择性生产电势计气体传感器的方法,为电势计气体传感器的广阔应用提供了保证。更多还原

【Abstract】 The characteristics of the electrochemistry micro-sensors are described in this dissertation.Chemical Resistance and Electric Potential Micro-sensors which are the two typical applications of electrochemistry micro-sensors are discussed in the paper.Then the principles and characteristics of Ion-sensitive field-effect transistor chemical sensors and Sensor function electric potential are analyzed in the paper.And it points out the application direction of electrochemistry.In the end,the paper describes how to use the optical carving technology and controllable selectivity of semiconductor to produce Electric Potential Micro-sensors,which promote the development of Electric Potential Micro-sensors.更多还原