【摘要】 采用一种改进的热丝 CVD系统沉积金刚石膜。在传统热丝 CVD腔中设置一套红外线发 生器，中心波长 3.5μ m,处于氢与甲烷分子拉伸振动吸收峰位置。由于共振吸收能量使反应气 体分解加强 ,在反应区获得较高浓度的原子氢和活性碳氢基团，使金刚石膜的生长速率和品质得到了提高。更多还原

【Abstract】 An improved hot－ filament CVD system was developed to deposit diamond films. An infrared generator in the hot－ filament CVD chamber was designed with the main wavelength 3.5μ m, which was right situated in the stretch vibration absorption peak of the C－ H bond in methane molecule and H－ H bond in hydrogen molecule. The decomposition of precursor gas is enhanced due to resonance absorption of energy, so high densities of hydrogen atom and active hydrocarbon cluster are obtained near the sub－ strate surface. Therefore, higher growth rate (13μ m/h) and high quality diamond film are achieved.更多还原