【作者】 邵兵；

【导师】 孙立宁；

【作者基本信息】 哈尔滨工业大学 ， 机械电子工程， 2006， 博士

【摘要】 微定位系统是当今科学研究和工程应用领域的热点。微定位系统应用领域主要有光学工程、微机械装配、精密检测、纳米科学研究、医疗科学与生物工程、半导体工业、航天航空等领域。激光星间通信是以激光为传输媒介,在卫星之间建立光通信链路,实现数据传输的技术。在激光星间通信系统中,APT技术是最为关键的技术之一,而在APT系统中,精瞄微定位技术是最为关键的技术之一,它直接决定了通信链路能否建立以及通信系统的性能。本课题为国家863计划701主题资助项目的子课题,在全面分析国内外激光通信和精瞄微定位技术发展现状的基础上,对激光星间通信精瞄微定位系统中的关键技术进行了研究,研究内容包括精瞄偏转镜结构设计、柔性环刚度模型的建立、精瞄偏转镜动力学建模与有限元分析、精瞄微定位驱动技术、微位移检测技术和智能控制方法等方面,并建立了精瞄微定位实验系统,进行了相关实验研究。首先在分析APT系统工作原理的基础上,提出采用复合轴控制结构执行激光通信的捕获、瞄准和跟踪任务。分析在捕获、瞄准和跟踪的不同阶段粗瞄准系统和精瞄微定位系统的协作方式,得出精瞄微定位系统的设计准则和技术指标要求。精瞄偏转镜是精瞄微定位系统的核心部件,通过精瞄偏转镜的偏转运动完成光路的调整。精瞄偏转镜采用四支压电陶瓷致动器驱动、铰链传动,通过柔性环的弹性变形实现激光反射镜面的偏转运动。该机构结构紧凑,由一整块合金钢通过电火花线切割工艺加工出铰链和柔性环,提供了传动的零摩擦、零间隙和高精度。通过结构力学分析,建立了精瞄偏转镜柔性环的刚度模型。通过矩阵位移法先得到1/8段柔性环的刚度矩阵,然后将单元刚度矩阵组集成总刚度矩阵。在此基础上,依据拉格朗日方程建立了精瞄偏转镜的动力学模型,分别得到了精瞄偏转镜沿Z轴平动和绕X、Y轴偏转的表达式,求出了精瞄偏转镜的前三阶固有频率。同时进行了精瞄偏转镜的模态分析和固有频率实验测试,通过三种方法得出的同阶固有频率数值误差小于10%,模态分析和实验测试验证了理论模型的正确性,表明精瞄偏转镜的动态性能指标满足设计要求。对精瞄微定位的驱动、检测和控制方法进行了研究,设计了精瞄微定位更多还原

【Abstract】 Micro-positioning system has attracted much attention recently in such application fields as optical engineering, micro-assembly, precision measurement, nano-science, medical science, biology, semiconductor industry and aerospace.As one of the best solutions for future space communication, free space optical communication possesses such advantages as high data rate, large capacity and high secrecy as compared with microwave communication. However, the extremely narrow beam width calls for severe acquisition, pointing and tracking requirements. As a key component of laser beam Acquisition, Pointing,and Tracking(APT) system for free space optical communication, the compact fine pointing steering mirror determines the performance of the communication system.This dissertation is part of a state“863”project. In this dissertation, on the basis of the latest domestic and overseas situation of laser communication and fine pointing micro-positioning technique, the theory and critical techniques are studied systematically and deeply, such as mechanical design of the fine pointing steering mirror, structural stiffness model of the flexible ring, dynamic modeling and model analysis of the fine pointing steering mirror, driving technique, measuring technique and intelligent control method of PZT, etc. The fine pointing micro-positioning experiment systems are built laterFirstly, on the basis of analyzing the principle of APT system,executing APT task by using compound-axis control structure is proposed. By studying cooperation mode of the coarse pointing system and the fine pointing micro-positioning system in different phases, optical open-loop phase and optical closed-loop phase, performance of the fine pointing micro-positioning system and coarse pointing system is acquired.This paper presents a new type structural design of the fine pointing steering mirror– a piezoelectrically-driven micro-positioning deflective mechanism where the tilt movements are implemented by the elastic deformation of flexible rings. It provides fast and precise control in tilt movements around X-axis, Y-axis and piston movement along Z-axis. The mechanism is machined from one solid更多还原