【作者】 朱学林；

【导师】 田扬超；

【作者基本信息】 中国科学技术大学 ， 核技术及应用， 2006， 博士

【摘要】 电化学检测的PMMA集成毛细管电泳芯片是在常规毛细管电泳(CapillaryElectrophoresis，CE)原理的基础上，利用现代微细加工技术在平方厘米级大小的芯片上制作出微流体管道和其他功能单元，通过不同的微管道、反应器、检测单元等模块的设计和布局，实现检测物的进样、反应、分离和检测等目的，是一种具有多功能化、高效、快速、低耗和便携等特点的微型实验装置。本文首先对集成电泳芯片进行了模拟分析和结构设计，在此基础上对毛细管电泳原型样机的加工制作进行了研究，随后对芯片的批量化制作技术进行了深入的研究，并利用芯片进行了样品分离和检测。论文主要的工作包括以下几个部分： 1) 对电化学检测的集成毛细管电泳芯片的结构分析和设计进行了深入研究。设计了芯片的基本结构；对微流体的特性进行了分析和模拟，研究了不同微管道图形单元对微流体的影响；研究了双电层EDL对微管道内部电场分布的影响；研究了在外加驱动电压下，微管道内部电场分布的特点；获得了较好的毛细管电泳电动进样控制方案。根据芯片检测需求和实际加工工艺的特点，对微流体管道进行了几何设计。最后设计了电化学检测电极体系。 2) 论文研究了基于SU8光刻胶和PMMA的毛细管电泳芯片样机的加工制作方法。该方法通过直接光刻得到SU8光刻胶微管道，代替了批量化制作工艺中的UV-LIGA工艺。利用lift-off工艺制作了微电极、最后通过真空热压键合技术成功地进行了芯片封装。实现了快速制作高质量电泳芯片样机。 3) 研究了芯片的批量化制作工艺方法。对UV-LIGA工艺中的光刻和微电铸进行了改进和优化，并应用于毛细管电泳芯片微管道的加工制作；利用lift-off技术制作了金薄膜微电极，实现了电极的制作和集成；利用PMMA表面改性键合技术对PMMA电泳芯片进行了键合封装，获得了较高的键合强度，提高了芯片的封装质量。更多还原

【Abstract】 PMMA microchip of capillary electrophoresis with electrochemical detection (CE-ECD chip) is the integrated chip to achieve the sample injection, reaction, separation and detection, with units such as micro-channels, react chambers, detection units, and etc. CE-ECD chip was fabricated using MEMS technologies, based on the theory of capillary electrophoresis. The CE chip has many advantages such as remarkable sensitivity, inherent miniaturization, portability, low cost, fast detection and etc. In this thesis, the structure and design of CE-ECD chip were first investigated, then the mass production of CE-ECD chips was studied, at last the fabricated chips were tested through the separating of combined samples. The main work and innovations are described as the following:1) The structure of the capillary electrophoresis chip was first analyzed and designed. The character of micro-fiuidic in the micro-channel was investigated through computer simulation using CFD software such as ANSYS and Fluent. At the same time, the different micro-channels’ effect on the fluidic was also investigated. The Electric Double Layer’s effect on the distribution of electric field in the micro-channel was studied, and the result shows that sample injection and separation are mainly determined by electric field of separating voltage. In order to archive effective sample injection, the control of voltage was optimized. The micro-channels were designed as for the fabrication of CE chip and the detection of samples. At last, the electrochemical detection system was designed for the CE chip.2) The sample chip of CE-ECD should be investigated before the study of mass production of CE chip. PMMA-SU8-PMMA based CE chip was fabricated as the sample chip. The SU8 micro-channel was fabricated through lithography instead of UV-LIGA process, which also has the high quality of pattern and fast production. The electrodes were fabricated through lift-off process, and the chip was packaged using the thermal bonding method.3) The mass production of CE chips was studied based on the UV-LIGA process. The conventional UV-LIGA process was first optimized and improved for the fabrication of the PMMA micro-channels: (1) The lithography parameters were optimized to obtain good adhesion of SU8 layer; (2) A second electric seed layer was sputtered on the surface of the cross-linked SU8 layer to reduce the line space of the structures before electroforming. The electrodes were fabricated and integrated onto the chip using lift-off process. The CE chip was packaged by the PMMA thermal bonding process based on the surface modification which developed by ourselves, and high更多还原