【作者】 肖凯；

【导师】 付绍军； 徐向东； 洪义麟； 刘颖；

【作者基本信息】 中国科学技术大学 ， 核技术及应用， 2006， 博士

【摘要】 软X射线显微镜由于其分辨率高、能在“水窗”波段对水中含碳物质形成天然的衬度、射线能量可与许多元素的吸收边对应等特点，在生命科学、环境科学和物理学等领域中有着广泛的应用。软X射线聚焦波带片对X射线色散和聚焦，软X射线成像波带片对样品成像，是软X射线显微镜中的关键元件。本论文结合国家同步辐射实验室的透过式软X射线显微镜对X射线波带片的迫切需要，以研制具有更高衍射效率和更长寿命的软X射线聚焦波带片为主要目标，系统地研究了软X射线聚焦波带片制作中的主要问题，提出了完整的工艺路线，并对位相型波带片与振幅型波带片的相对效率进行了测量。 软X射线聚焦波带片的研制包括光路设计、膜系设计、衬底选择、薄膜制备、亚微米光刻、X射线光刻、反应离子刻蚀、离子束刻蚀、电镀和化学腐蚀等多种微细加工技术。 本文对全息软X射线聚焦波带片的研制进行了系统的研究，提出了完整的工艺路线，并对位相型波带片与振幅型波带片的相对效率进行了测量。 本论文的研究工作和创新之处可概括为以下几点： (1) 软X射线自支撑型聚焦波带片的研制。自支撑型波带片的主要特点是利用金属加强筋来支撑波带片图形，而不是用薄膜来支撑波带片图形，可以提高元件在X射线辐射下的使用寿命。先利用激光全息-离子束刻蚀技术制作了以聚酰亚胺为衬底的金振幅型波带片，然后以该波带片为掩模，采用同步辐射光刻-离子束刻蚀的方法得到金属波带片图形，再电镀出金加强筋，制作了金自支撑波带片。 (2) 软X射线Ni和Ge位相型聚焦波带片的研制。位相型波带片相对振幅型波带片具有更高的衍射效率。通常大高宽比的Ge波带片图形可使用氟基气体的反应离子刻蚀得到，Ni波带片图形通常使用Ni的低应力电镀得到。如果图形高宽比较大，可以使用氮化硅薄膜为衬底。对于氮化硅薄膜，在利用热蒸发镀Ge膜时，为匹配应力应选择高压应力的氮化硅薄膜，而对电镀Ni图形，则应选用低应力的氮化硅薄膜。因为聚酰亚胺薄膜的弹性更多还原

【Abstract】 Because of advantages such as high resolution, a natural contrast for samples containing carbon in water, and the soft x-ray energy matching the absorb line of many elements, soft X-ray microscopies have many important applications in life science, environmental science and physics. X-ray condenser zone plates (CZP) focalize and disperse X-ray, and x-ray micro zone plates (MZP) serve as the imaging component for the sample, which are both the key components in soft X-ray microscope. This dissertation was aimed at this background, and the main motivation was to fabricate soft X-ray CZP with longer life and higher efficiency for the transmission soft X-ray microscope in the National Synchrotron Radiation Laboratory. The main problems in the fabrication of X-ray CZP are investigated, and the fabrication processes are presented. The relative efficiencies between phase CZP and amplitude CZP are measured.The development of soft X-ray CZP included design of optical path, selection of material, preparation of thin film, sub-micron lithography, X-ray lithography, reactive ion etching, ion beam etching, electroplating and chemical etching.We integrally investigated the fabrication of holographic Soft X-ray CZP, and suggested the full process of the fabrication of soft X-ray CZP, and the measurement of relative efficiency between phase zone plates and an amplitude zone plate was also carried out.The main works of this thesis can be summarized as follows:(1) Fabrication of soft X-ray self-supporting (or free-standing) condenser zone plates. The main characterization of a self-supporting zone plate is to use not membrane but metal struts to support the zones. This kind of zone plate has a longer life than the zone plates with membrane substrate under radiation. We used laser holography-ion beam etching technology fabricated Au condenser zone plates with polyimide substrate, and the Au zone plates was employed as the mask of synchrotron radiation lithography, and then we used ion beam etching technology to obtain metal a zone plate pattern. Lastly, the Au support struts are fabricated by micro electroplating.(2) Fabrication of Ni and Ge X-ray phase condenser zone plates. X-ray phase zone plates have higher efficiencies than amplitude zone plates. In common use, the Ge zone plates with high aspect ratio can be fabricated by fluoride gases, and the Ni zone plates with high aspect ratio can be fabricated by nickel low stress electroplating. If the aspect ratio of a zone plate is high, silicon nitride membrane can be employed as substrate. High compressive silicon nitride membrane should be used when Ge is evaporated on the membrane, and low stress silicon nitride membrane should be used when fabricating Ni zone plate pattern by electroplating. The matching of the stress of polyimide membrane is easier because of its very good elasticity, and considering the condenser zone plates we fabricated are with low aspect ratio, so we used synchrotron radiation lithography-ion beam etching更多还原