【作者】 李红军；

【导师】 翁志成； 廖江红；

【作者基本信息】 中国科学院长春光学精密机械与物理研究所 ， 光学， 2001， 博士

【摘要】 衍射光学元件基于光波的衍射原理，具有色散特性独特、体积小和重量轻等优点，得到人们普遍重视，已被广泛应用于红外光学系统、光互连、全息显示、光学扫描、图象识别和图象处理、视觉模拟系统等许多领域。 本论文主要工作围绕国防科工委预研课题“衍射光学系统设计及工艺研究”展开。本论文的主要工作包括以下四个部分：1．衍射光学元件衍射效率的讨论 衍射光学元件在制作过程中，存在掩模对准、线宽和刻蚀深度等制作误差。这些制作误差对衍射光学元件的衍射效率都有影响。本文结合实际制作的衍射光学元件，讨论制作误差对16阶衍射光学元件的影响。2．对准误差对光学传递函数的影响 对于折衍混合光学系统，更关心的是衍射光学元件的制作误差对系统光学传递函数的影响。本文讨论对准误差对光学传递函数的影响，得出普遍规律。3．衍射光学元件的制作及衍射效率的测量 根据课题要求及具体实验条件，使用薄膜沉积和离子束刻蚀法制作16阶衍射光学元件并进行衍射效率测量，分析部分实际制作误差对衍射效率的影响。4．衍射光学元件在光学系统中的应用 将衍射光学元件应用于光学系统，研制成功折衍混合小型CCD相机。 中国科学院长春光学精密机械与物理研究所博士学位论文 一 并使用星点法、分辨率及光学传递函数进行光学系统成像质量的评价及室外 成像实验。更多还原

【Abstract】 Diffractive optical element(DOE) based on diffractive theory has many advantages as special dispersion, small volume and lightweight,etc. It has been obtained recognition and has been widely used in many areas such as infrared optical system, optical connection, holography display, optical scanner, imagine identification, etc. In this paper main works about subject he design and technology research on diffractive optical system?supported by Science and Industry Committee of National Defence have been carried our. The task required by the subject is learning the technology of..DOE fabrication and manufacturing hybrid diffractive/refractive optical system. The subject has been received an obtained high opinion from experts. Main works include four parts as follow: 1. Discussing diffractive efficiency of DOE There are alignment errors, linewidth errors and etching errors in fabrication of DOE. These errors have effects on diffractive efficiency of DOE. Combined with DOE fabricated by us, ulteriorly discuss the effects of fabrication errors on diffractive efficiency of 16-step DOE. Especially, the effects of linewidth errors have been discussed. 2. The effects of alignment errors on optical transfer function (QTF) We concern about the effects of the fabrication errors on OTF of optical system for hybrid diffractive/refractive optical system. In this paper, the effects of alignment errors on OTF have been discussed and the general law has been obtained. 3. The fabrication and measurement of DOE According as the request of the subject and practical condition, DOE is fabricated by thin film deposition and ion beam etching. At one time, the diffractive efficiency has been measured and the effects of the fabrication errors on diffractive efficiency have been discussed. 4. The application of DOE in optical system DOE has been used in optical system and hybrid diffracive/refractive miniature CCD camera has been manufactured. The resolving power and OTF have been used to evaluate the optical system and imaging experiment has been carried out. airy disk, quality of更多还原