【作者】 李志刚；

【导师】 李福田；

【作者基本信息】 中国科学院长春光学精密机械与物理研究所 ， 光学， 2000， 博士

【摘要】 本文第一章综述了傅里叶变换光谱技术的研究及发展概况，着重阐述了几种应用于紫外、真空紫外及软Ｘ射线波段吸收和发射光谱测量的傅里叶变换光谱仪结构性能与原理，进一步介绍了高分辨率傅里叶交换光谱仪在短波段光学中的应用，系统地分析了博里叶变换光谱技术向短波段拓展的必要性和主要技术难点，从而提出论文的主要研究内容。第二章从傅里叶交换光谱仪的基本原理出发，讨论并分析了影响谱仪光谱分辨率及谱线位移的因素，结合大数据量FFT数值算法给出典型模拟光谱线，探讨了短波段谱仪的多重传输特性。第三章介绍了所研制的高分辨率、高精度、宽光谱范围、小型紫外—真空紫外傅里叶交换光谱仪实验装置。提出了光学系统结构设计，研究了“猫眼”后反器及分束耦合器的结构原理，分析了稳频激光作为谱仪采样控制参考光源的依据。根据在研光谱仪分束耦合器的技术要求，开展了采用Al＋MgF₂材料制作紫外—真空紫外波段分束膜的实验研究。通过数值计算分析了膜层选材及膜系设计，制备了分束膜，建立以Seya-Namioka单色仪为主体的实验装置测量了紫外熔石英基底上镀制分束膜在5°入射角下的光谱特性，并给出结果分析。介绍了研制的由放大器、带通滤波器、自动增益控制和锁相环倍频等电路构成的谱仪电子学采集与处理系统，选用光电隔离型A/D数据采集卡，进行了模拟实验。研制了由分立液压和电控元件构成的电控精密气动液压装置用于平稳推进“猫眼”动镜系统，测量了ZYGO干涉仪光源光谱图，与理论值相符合。第四章提出了干涉图数据处理方法，并以汞灯为光源，使用四阶Blackman-Harris窗函数作为切趾函数，采用最小二乘法拟合多项式对光源光谱进行相位校正，获得了高精度的Hg原子紫外发射光谱，对紫外—真空紫外傅里叶交换光谱仪及干涉图处理程序进行了验证。实验表明280～600nm波长偏差在0.0002～0.009nm以内，300nm波长处光谱分辨率高于1.5×10⁵。介绍了真空紫外波段光谱测量用真空室和用于液压传动的威尔逊密封装置。第五章描述了软Ｘ射线傅里叶变换光谱仪的初步研究。结合夫琅和费衍射理论分析了新型Mach-Zehnder分波前式软Ｘ射线傅里叶变换光谱仪的工作原理，探讨了探测器接收狭缝宽度的约束条件，得出光程差反演公式，指出谱仪研制的关键环节及难点。第六章对全文工作进行了总结，并对今后的研究工作提出了展望。更多还原

【Abstract】 The survey of research and development about Fourier transform spectroscopy is summarized firstly in Chapter One of this dissertation. The structures, performance and principle of several kinds of Fourier transform spectrometers which are used in ultraviolet, vacuum ultraviolet and soft X-ray regions are described emphatically and the applications of high resolution Fourier transform spectrometer are further elaborated. The needs to extend Fourier transform spectroscopy to the short wavelength optical region and the main technical difficulties involved are discussed systematically. The main research content of dissertation is presented finally. In Chapter Two, some factors which effect spectral resolution and position shifts of lines are discussed and analyzed according to the basic principle of Fourier transform spectrometer. Numerical simulations of spectral line is given by using a kind of FFT algorithm for large number data and the characteristic of multiplex in the short wavelength region is debated at the end of this chapter. The developed experimental installation of Fourier transform spectrometer for ultraviolet and vacuum ultraviolet regions is described in Chapter Three, it has the advantages of high resolution, high precision, wide spectral region and compact. At first, the design for optical structure is put forward. The mechanisms and structures of beamsplitter/recombiner and catseye retrorefiector are investigated, the reason why stabilized laser is utilized to be reference light source in spectrometer is analyzed. Secondly, the experimental investigation which used A1 +MgF2 as beamsplitter coatings in ultraviolet and vacuum ultraviolet are carried out based on the practical requirement of beamsplitter of Fourier transform spectrometer during development. The probabilities of film layers material selection and structure design have been analyzed by means of some numerical calculations. We have developed an instrument employing Seya-Namioka monochromator, mainly for measuring the spectral properties of beamsplitter films grown on ultraviolet fused quartz substrate at an incident angle of 5 degrees. The results of measurement are discussed. This work extends the area of application of Al + MgF2 coatings. The electronic circuits used to sample and record the light source interferogram are presented, it is consisted of amplifiers, bandpass filter,automatic gain control, phase locked loop units and so on. Electrical simulation has been performed by means of photoelectric insulated A/D sampling converter. The importance of driving mirror smoothly used in Fourier transform spectrometer is discussed. We have designed and used high precision pneumatic hydraulic servo system to move catseye movable mirror in Fourier transform spectrometer. The spectrum of source in ZYGO interferometer is measured by use of this system, and the result conforms to theory. The method of data processing for interferogram is discribed in Chapter Four. The interferogram of a mercury lamp has been measured in experiment by means of ultraviolet Fourier transform spectrometer in developing. The apodization function that we have chosen is four-term Blackman-Harris window function and a fitting polynomial has been used for phase correction of Fourier transform spectra based on the least square method. The ultraviolet emission lines of high precision have been obtained by use of this method. The performances of spectrometer and the program of data processing for interferogram are tested and verified through experiments. The measuring range is in the wavelength region from 170nm to 600nm. The spectral resolution of transformed spectrum is better than l.5×105 at 300nm and wavelength accuracy of this Fourier transform spectrometer is in the range from 0.0002nm to 0.009nm over the spectral region 280nm to 600nm. The devices including vacuum tank and Wilson seal system used to measuring the spectra in vacuum ultraviolet are sho更多还原