Evaporation, the classical method of thin film deposition, is still commonly used for the production of optical coatings today. The technique of electron beam evaporation delivers a high rate of deposition. Three dimensional or curved substrates are also coated by ebeam evaporation in order to achieve good film thickness distribution. Because of the low energy of the condensing particles the packing density of thermally evaporated films is very low. The achieved film properties are quite different to t...
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