The surface layer of 9Cr18 steel was irradiated by using pulsed high current electron beam (PHCEB) after titanium ion implantation. AES was used to analyze the chemical composition of the implanted layer.The micro-hardness of the surface layer before and after the pulsed electron beam irradiation were measured. The enhanced diffusion effect of surface composition on the ion-implatned metal materials by PHCEB was discussed.