Successful Silicon to silicon direct bonding(SDB)mainly depend on the hydrophilicity treatment of silicon surface.Micro mechanism of hydrophilicity has been analyzed in the paper for the first time.From the point of physical chemistry of surface,the hydrophilicity level of common surface treatment can be characterized by the contact angle of a drop of water on the silicon surface.An indirect method to determine the contact angle based on suspensory principle is developed.
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