Recent years, with the significant development of the MEMS(Micro-Electro-Mechanical Systems) fabrication, film bulk acoustic resonator(FBAR) has obtained an extensive business application. On one hand, FBAR plays an important role in mobile communication area. Because of these excellent properties of small size, high frequency, low insert-loss, high power capacity of the FBAR RF devices, the oscillators, filters, duplexers made of FBAR have been used extensively in mobile communication area. On the other ha...