With the development of science and technology, MEMS has become the important direction of development. The important way of achieve and use MEMS is micro-machining technology. In the paper, the major research object is photolithogrphy and ICP etching technology, and machined the slider of hard disk have two step.
First, research the method and principle of micromachining technology. The micro-maching technology major include photolithography and etching technology. The photolithography includ...
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