With the development of laser process technology and micro-machinery, the requirement of high accuracy, non-contact testing for micro-object is increasing. In this paper, A Microlens-CCD-Computer system was developed which can test the size of micro-object with high curacy, non-contact, automatic and compiled testing program.
The hardware of this system is composed of 2D movable stage, microscope, CCD camera, reflector prism, Frame Grabber Board and computer. Digital image processing is implemen...