Micro-Electro-Mechanical Systems is an enabling manufacturing technology with numerous and diverse applications having a dramatic impact on almost everything from aerospace technology to biotechnology. MEMS is forecasted to have a commercial market growth similar to its parent IC technology. However, the complexities of MEMS design and the high cost of MEMS product slow down this growing. Therefore people are usually looking for new MEMS design methodology or software tools to both improve the q...
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