The distributed parameters of the mechanical vibration were lumped and the lumped parameters were extracted by the analysis of the mechanical vibration equation for the radial vibration disk.Then the lumped mechanical parameters were converted to electric parameters by the electromechanical analogy method,and the electric parameters model of the radial vibration mechanical resonator was established.The mechanical radial vibration disk resonator was simulated with the ANSYS software,and the resonant frequenc...
【更新日期】
2011-05-19
【分类号】
TH703
【正文快照】
E-m a il:jiayingq ian_0318@163.com2011年4月微纳电子技术第48卷第4期0引言微机械谐振器是MEMS器件之一,随着通信系统小型化、高频化及多功能化的发展及微机械加工水平的不断提高,微机械谐振器的研究越来越受到重视,各国学者纷纷展开研究[1-3]。圆盘式谐振器工作于体声波振动
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