A novel tuning fork micromachined gyroscope,based on bulk micromachining technology,is presented.Slide-film damping plays an important role in this sensor,which enables it to achieve high Q-values and sensitivity and low thermal noise.The analysis shows that this sensor has lower thermal noise.The performance of the sensor is tested.The sensitivity is 10mV/(°·s -1),and the white noise and 1/f noise are less than 60μV/Hz.The sensor has shown its potential to achieve high performance.
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