A series of Mo~(6+) doped TiO_2 thin films were prepared by sol-gel method.The obtained films were characterized by XRD,SEM,and CAS methods.It was found that the thermal-induced superhydrophilicity and photo-induced superhydrophilicity were effected by the dopant concentration,the 0.75% Mo doped TiO_2 thin film calcined at 400 ℃ showed superhydrophilicity even stored in the darkness for 72 h.